Wet benches

The object of the tender is manually operated wet process benches ( 10 benches in total ) for front end processing in VTT Micronova cleanroom. The tenderer should offer each of the wet benches 1-10, partial tenders will not be accepted. The cleanroom classification is ISO 4…ISO 6 (10…1000). The total area of the cleanroom is 2 600 m2, and there is an installed equipment base of 200 processing and measurement tools. The current main wafer size is 150 mm, but the equipment will gradually be renewed or upgraded, in order to facilitate a full process capability on 200 mm wafers by the end of the year 2025. Mainly silicon and quartz wafers are processed in the fab. Application of the wet benches is pn-diode type radiation detectors utilizing high resistivity silicon and other silicon based active devices The technical specification of each wet process bench to be supplied is described in more detail in Annex 1 and Annex 2 of invitation to tender. The equipments (benches) must comply with technical properties and functionality, performance specifications and acceptance criteria set out in Annex 1. The equipments must also comply with the Cleanroom equipment standard safety and contamination requirements set out in Annex 2. A tender which does not meet one or more of the requirements specified in the annexes 1 and / or 2, may be rejected for failing to comply with the call for tenders. Tenders will be compared on the basis of 100% of the price. A unit price has to be given for each wet bench (total price of the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1). The reference price of the tender is determined by the sum of the unit prices of wet benches together. The contract will be awarded to one supplier that can guarantee a high standard of quality and who is capable of providing the necessary wet process benches, installation, and user training in its entirety. The estimated total value (excluding VAT) of the procurement is 2 000 000 - 2 500 000 euros. The object of the tender process is described in more detail in the invitation to tender documents. NON-MANDATORY OPTIONS 1. The invitation to tender includes three (3) systems as non-Mandatory Options further defined in Annex 1, which (one or more) the tenderer may choose to offer. VTT does not commit to purchase the optional system(s). The price(s) of the option(s) are not taken into account when comparing tenders. Please note that tenderer who has not offered wet benches 1-10, which are the main object of the procurement, cannot offer the system(s) requested as an option. Tenderer may also offer an optional 12-month extra warranty period (added to the mandatory 12 months warranty period) to each bech. VTT does not commit to purchase the extra warranty period for any of the benches. The price(s) of the option(s) are not taken into account when comparing tenders.