Plasma ALD batch deposition tool services

ALD (atomic layer deposition) technology is crucial in cleanroom processing in MEMS. Picosun Oy has been VTT’s tenant for several years by renting space from VTT cleanroom for its equipment, for example to run a demo ALD tool. Picosun gives VTT the right to use ALD so that VTT’s own personnel can operate Picosun equipment. Processing of MEMS and other devices on silicon wafers is very sensitive and takes place in a controlled cleanroom environment, where the wafers must be handled and processed by qualified operators/researchers. Using an external fab for processing would mean shipping partly processed wafers after some process steps to another facility and then back to continue the processing with VTT’s own equipment. This poses risks to induce particles or other contamination during external processing or during transport,and to damage the wafers during transportation. It is not possible to have other ALD manufacturers to provide their demo equipment into VTT’s Micronova facility, because VTT’s cleanroom is full and VTT cannot rent it to out to new companies.